학술논문
'학술논문'
에서 검색결과 40건 | 목록
20~30
Conference
Van Haren, R.; Cekli, H.E.; Liu, X.L.; Beltman, J.; Pastol, A.; Massin, J.; La Tour, E.D.; Gatefait, M.; Sundermann, F.
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2014, 9235)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8681)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8681)
Conference
Gatefait, M.; Le-Gratiet, B.; Goirand, P.J.; Lam, A.; Van Haren, R.; Pastol, A.; Doytcheva, M.; Liu, X.L.; Beltman, J.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8681)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2010, 7638)
Conference
Dabertrand, K.; Touchet, M.; Gatefait, M.; Aparicio, E.; Chaton, C.; Royer, J.-C.; Kremer, S.; Polli, M.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 6922)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 6924)
Conference
Le Gratiet, B.; Gouraud, P.; Aparicio, E.; Babaud, L.; Dabertrand, K.; Touchet, M.; Foussadier, F.; Sundermanna, F.; Massin, J.; Chapon, J.-D.; Gatefait, M.; Minghetti, B.; De-Caunes, J.; Boutin, D.; Chaton, C.; Kremer, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 6922)
Academic Journal
Carrre, J.P.; Oddou, J.P.; Place, S.; Richard, C.; Benoit, D.; Jenny, C.; Gatefait, M.; Aumont, C.; Tournier, A.; Roy, F.
In: Solid-State Electronics . (Solid-State Electronics, November 2011, 65-66(1):51-56)
Periodical
Starikov, Alexander; Cain, Jason P.; Orlando, B.; Spaziani, N.; Socquet, N.; Bouyssou, R.; Gatefait, M.; Goirand, P.J.
Proceedings of SPIE; April 2013, Vol. 8681 Issue: 1 p868118-868118-7
검색 결과 제한하기
제한된 항목
[AR] Gatefait, M.
발행연도 제한
-
학술DB(Database Provider)
저널명(출판물, Title)
출판사(Publisher)
자료유형(Source Type)
주제어
언어