학술논문
'학술논문'
에서 검색결과 7건 | 목록
1~10
Academic Journal
IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 18(6):923-929 Dec, 1990
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2019, 10959)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , 34th European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10775)
Optical emission spectroscopy for diagnostic and monitoring of CH4 plasmas used for a-C: H deposition
Academic Journal
In: Journal of Physics D: Applied Physics . (Journal of Physics D: Applied Physics, 14 July 1990, 23(7):799-805)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2015. (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9635)
Conference
Van Haren, R.; Cekli, H.E.; Liu, X.L.; Beltman, J.; Pastol, A.; Massin, J.; La Tour, E.D.; Gatefait, M.; Sundermann, F.
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2014, 9235)
Conference
Gatefait, M.; Le-Gratiet, B.; Goirand, P.J.; Lam, A.; Van Haren, R.; Pastol, A.; Doytcheva, M.; Liu, X.L.; Beltman, J.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8681)
검색 결과 제한하기
제한된 항목
[AR] Pastol, A.
발행연도 제한
-
학술DB(Database Provider)
저널명(출판물, Title)
출판사(Publisher)
자료유형(Source Type)
주제어
언어