학술논문

발행년
-
(예 : 2010-2015)
'학술논문' 에서 검색결과 7건 | 목록 1~10
Academic Journal
IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 18(6):923-929 Dec, 1990
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Metrology, Inspection, and Process Control for Microlithography XXXIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2019, 10959)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, 34th European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10775)
Academic Journal
In: Journal of Physics D: Applied Physics. (Journal of Physics D: Applied Physics, 14 July 1990, 23(7):799-805)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Photomask Technology 2015. (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9635)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2014, 9235)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Metrology, Inspection, and Process Control for Microlithography XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8681)
검색 결과 제한하기
제한된 항목
[AR] Pastol, A.
발행연도 제한
-
학술DB(Database Provider)
저널명(출판물, Title)
출판사(Publisher)
자료유형(Source Type)
주제어
언어