학술논문
'학술논문'
에서 검색결과 40건 | 목록
10~20
Conference
Vickers, J. S.; Galvier, J.; Doedel, W.; Steinbrueck, G.; Borot, B.; Gatefait, M.; Gouraud, P.; Gros, P.; Johnson, G.; Babazadeh, M.; Pelella, M.; Pakdaman, N.
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72724C-72724C-8, 8p
Periodical
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97782Y-97782Y-10, 9680429p
Periodical
Behringer, Uwe F.W.; Finders, Jo; Gatefait, M.; Lam, A.; Le Gratiet, B.; Mikolajczak, M.; Morin, V.; Chojnowski, N.; Kocsis, Z.; Smith, I.; Decaunes, J.; Ostrovsky, A.; Monget, C.
Proceedings of SPIE; September 2015, Vol. 9661 Issue: 1 p96610P-96610P-7, 869498p
Periodical
Behringer, Uwe F. W.; Le-Gratiet, B.; Gatefait, M.; Ducotè, J.; Decaunes, J.; Lam, A.; Beraud, B.; Mikolajczak, M.; Pelletier, A.; Orlando, B.; Sundermann, F.; Ostrovsky, A.; Lapeyre, C.
Proceedings of SPIE; October 2014, Vol. 9231 Issue: 1 p92310V-92310V-9, 830800p
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXX. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9778)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2015. (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9635)
Conference
Gatefait, M.; Lam, A.; Le Gratiet, B.; Mikolajczak, M.; Morin, V.; Chojnowski, N.; Kocsis, Z.; Smith, I.; Decaunes, J.; Ostrovsky, A.; Monget, C.
In: Proceedings of SPIE - The International Society for Optical Engineering , 31st European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9661)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9424)
Periodical
Garnier, Philippe; Pernet, B.; Gomez, Y.; Duluard, C.; Torres, Alphonse; Barge, David; Gatefait, M.; Lévy, Didier
Diffusion and Defect Data Part B: Solid State Phenomena; January 2009, Vol. 145 Issue: 1 p219-222, 4p
Conference
Le-Gratiet, B.; Gatefait, M.; Ducotè, J.; Decaunes, J.; Lam, A.; Beraud, B.; Mikolajczak, M.; Pelletier, A.; Orlando, B.; Sundermann, F.; Ostrovsky, A.; Lapeyre, C.
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2014, 9231)
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[AR] Gatefait, M.
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