학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 40건 | 목록 10~20
Periodical
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97782Y-97782Y-10, 9680429p
Periodical
Proceedings of SPIE; September 2015, Vol. 9661 Issue: 1 p96610P-96610P-7, 869498p
Periodical
Proceedings of SPIE; October 2014, Vol. 9231 Issue: 1 p92310V-92310V-9, 830800p
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Metrology, Inspection, and Process Control for Microlithography XXX. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9778)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Photomask Technology 2015. (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9635)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, 31st European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9661)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9424)
Periodical
Diffusion and Defect Data Part B: Solid State Phenomena; January 2009, Vol. 145 Issue: 1 p219-222, 4p
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2014, 9231)
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제한된 항목
[AR] Gatefait, M.
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