학술논문
'학술논문'
에서 검색결과 14건 | 목록
1~10
Conference
Arnaud, F.; Duriez, B.; Tavel, B.; Pain, L.; Todeschini, J.; Jurdit, M.; Laplanche, Y.; Boeuf, F.; Salvetti, F.; Lenoble, D.; Reynard, J.P.; Wacquant, F.; Morin, P.; Emonet, N.; Barge, D.; Bidaud, M.; Ceccarelli, D.; Vannier, P.; Loquet, Y.; Leninger, H.; Judong, F.; Perrot, C.; Guilmeau, I.; Palla, R.; Beverina, A.; DeJonghe, V.; Broekaart, M.; Vachellerie, V.; Bianchi, R.A.; Borot, B.; Devoivre, T.; Bicais, N.; Roy, D.; Denais, M.; Rochereau, K.; Difrenza, R.; Planes, N.; Brut, H.; Vishnobulta, L.; Reber, D.; Stolk, P.; Woo, M.
Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004. VLSI technology VLSI Technology, 2004. Digest of Technical Papers. 2004 Symposium on. :10-11 2004
Conference
Arnaud, F.; Boeuf, F.; Salvetti, F.; Lenoble, D.; Wacquant, F.; Regnier, C.; Morin, P.; Emonet, N.; Denis, E.; Oberlin, J.C.; Ceccarelli, D.; Vannier, P.; Imbert, G.; Sicard, A.; Perrot, C.; Belmont, O.; Guilmeau, I.; Sassoulas, P.O.; Delmedico, S.; Palla, R.; Leverd, F.; Beverina, A.; DeJonghe, V.; Broekaart, M.; Pain, L.; Todeschini, J.; Charpin, M.; Laplanche, Y.; Neira, D.; Vachellerie, V.; Borot, B.; Devoivre, T.; Bicais, N.; Hinschberger, B.; Pantel, R.; Revil, N.; Parthasarathy, C.; Planes, N.; Brut, H.; Farkas, J.; Uginet, J.; Stolk, P.; Woo, M.
2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407) VLSI technology VLSI Technology, 2003. Digest of Technical Papers. 2003 Symposium on. :65-66 2003
Academic Journal
Hazelton, A.J.; Wakamoto, S.; Hirukawa, S.; Magome, N.; Ishikawa, J.; McCallum, M.; Lapeyre, C.; Guilmeau, I.; Barnola, S.; Gaugiran, S.
In: Journal of Micro/Nanolithography, MEMS, and MOEMS . (Journal of Micro/Nanolithography, MEMS, and MOEMS, 2009, 8(1))
Academic Journal
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms . (Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, August 1997, 131(1-4):270-275)
Periodical
Beverina, Alessio; Guilmeau, I.; Carrere, J.P.; Emonet, N.; Guyader, F.; Huard, V.; Petitdidier, Sébastien; Velard, R.
Diffusion and Defect Data Part B: Solid State Phenomena; May 2003, Vol. 92 Issue: 1 p235-238, 4p
Conference
Arnaud, F.; Boeuf, F.; Salvetti, F.; Lenoble, D.; Wacquant, F.; Regnier, C.; Morin, P.; Emonet, N.; Denis, E.; Oberlin, J.C.; Ceccarelli, D.; Vannier, P.; Imbert, G.; Sicard, A.; Perrot, C.; Belmont, O.; Guilmeau, I.; Sassoulas, P.O.; Delmedico, S.; Palla, R.
2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407); 2003, p65-66, 2p
Conference
Binnard, M.; Gaugiran, S.; Hazelton, A.J.; Wakamoto, S.; Hirukawa, S.; Magome, N.; Ishikawa, J.; McCallum, M.; Lapeyre, C.; Guilmeau, I.; Barnola, S.
In: Proceedings - ASPE Spring Topical Meeting on Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment, ASPE 2008 , Proceedings - ASPE Spring Topical Meeting on Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment, ASPE 2008. (Proceedings - ASPE Spring Topical Meeting on Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment, ASPE 2008, 2008, 43:10-15)
Conference
Hazelton, A.J.; Wakamoto, S.; Hirukawa, S.; Magome, N.; Ishikawa, J.; McCallum, M.; Lapeyre, C.; Guilmeau, I.; Barnola, S.; Gaugiran, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 6924)
Conference
Chapon, J.-D.; Gouraud, P.; Chaton, C.; Guilmeau, I.; Trouiller, Y.; Broekaart, M.; Belledent, J.; Warrick, S.
In: Progress in Biomedical Optics and Imaging - Proceedings of SPIE , Advances in Resist Technology and Processing XXII. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE, 2005, 5753(II):708-719)
Conference
Guilmeau, I.; Vachellerie, V.; Lenoble, D.; Nogueira, P.; Mougel, S.; Chapon, J.-D.; Guerrero, A.F.; Blain, V.; Kremer, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Resist Technology and Processing XXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2004, 5376(PART 1):461-470)
검색 결과 제한하기
제한된 항목
[AR] Guilmeau, I.
발행연도 제한
-
학술DB(Database Provider)
저널명(출판물, Title)
출판사(Publisher)
자료유형(Source Type)
주제어
언어