학술논문
'학술논문'
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1~10
Conference
Saied, M.; Gardin, C.; Montgomery, P.K.; Yesilada, E.; Wilkinson, B.; Foussadier, F.; Urbani, J.C.; Sundermann, F.; Robert, F.; Vautrin, F.; Kerrien, G.; Planchot, J.; Martinelli, C.; Farys, V.; Belledent, J.; Couderc, C.; Borjon, A.; Le-Cam, L.; Rody, Y.; Trouiller, Y.; Di-Maria, J.L.; Schanen, I.; Morgana, N.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XX. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6520(PART 3))
Conference
Saied, M.; Yesilada, E.; Gardin, C.; Wilkinson, B.; Morgana, N.; Foussadier, F.; Urbani, J.C.; Sundermann, F.; Robert, F.; Vautrin, F.; Kerrien, G.; Planchot, J.; Martinelli, C.; Farys, V.; Belledent, J.; Couderc, C.; LeCam, L.; Rody, Y.; Borjon, A.; Trouiller, Y.; Di-Maria, J.-L.; Schanen, I.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2007. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6730)
Conference
Couderc, C.; Belledent, J.; Borjon, A.; Rody, Y.; Trouiller, Y.; Sundermann, F.; Urbani, J.C.; Foussadier, F.; Baron, S.; Lucas, K.; Patterson, K.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask and Next-Generation Lithography Mask Technology XII. (Proceedings of SPIE - The International Society for Optical Engineering, 2005, 5853 PART I:141-151)
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제한된 항목
[AR] Urbani, J.C.
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