학술논문

	o	ㅋ	ㄱ	ㅅ	ㅈ	ㅌ	ㄷ	촉	ㄴ	ㅎ	ㅂ	ㅃ	ㅁ	야	ㄹ	와
ㅏ	あ a	ぁ	か ka	が ga	さ sa	ざ za	た ta	だ da		な na	は ha	ば ba	ぱ pa	ま ma	や ya	ゃ lya	ら ra	わ wa	ゎ lwa	ん n
l	い i	ぃ	き ki	ぎ gi	し si	じ zi	ち ti	ぢ di		に ni	ひ hi	び bi	ぴ pi	み mi			り ri
ㅜ	う u	ぅ	く ku	ぐ gu	す su	ず zu	つ tu	づ du	っ	ぬ nu	ふ hu	ぶ bu	ぷ pu	む mu	ゆ yu	ゅ lyu	る ru
ㅔ	え e	ぇ	け ke	げ ge	せ se	ぜ ze	て te	で de		ね ne	へ he	べ be	ぺ pe	め me			れ re
ㅗ	お o	ぉ	こ ko	ご go	そ so	ぞ zo	と to	ど do		の no	ほ ho	ぼ bo	ぽ po	も mo	よ yo	ょ lyo	ろ ro	を wo

	o	ㅋ	ㄱ	ㅅ	ㅈ	ㅌ	ㄷ	촉	ㄴ	ㅎ	ㅂ	ㅃ	ㅁ	야	ㄹ	와
ㅏ	ア a	ァ	カ ka	ガ ga	サ sa	ザ za	タ ta	ダ da		ナ na	ハ ha	バ ba	パ pa	マ ma	ヤ ya	ャ lya	ラ ra	ワ wa	ヮ lwa		ン n
l	イ i	ィ	キ ki	ギ gi	シ si	ジ zi	チ ti	ヂ di		ニ ni	ヒ hi	ビ bi	ピ pi	ミ mi			リ ri
ㅜ	ウ u	ゥ	ク ku	グ gu	ス su	ズ zu	ツ tu	ヅ du	ッ	ヌ nu	フ hu	ブ bu	プ pu	ム mu	ユ yu	ュ lyu	ル ru			ヴ vu
ㅔ	エ e	ェ	ケ ke	ゲ ge	セ se	ゼ ze	テ te	デ de		ネ ne	ヘ he	ベ be	ぺ pe	メ me			レ re
ㅗ	オ o	ォ	コ ko	ゴ go	ソ so	ゾ zo	ト to	ド do		ノ no	ホ ho	ボ bo	ポ po	モ mo	ヨ yo	ョ lyo	ロ ro	ヲ wo		ーー

독일어
ä	Ä	ö	Ö	ü	Ü	ß
프랑스어
á	à	Á	À	é	è	É	È	ç	Ç	ê
스페인어
à	á	Á	é	É	í	Í	Ó	ó	Ú	ú	Ñ	ñ	ä	Ä

발행년	- (예 : 2010-2015)

전체선택

32 nm node BEOL integration with an extreme low- k porous SiOCH dielectric k = 2.3

Academic Journal

Hamioud, K.; Arnal, V.; Farcy, A.; Jousseaume, V.; Zenasni, A.; Icard, B.; Pradelles, J.; Manakli, S.; Brun, Ph.; Imbert, G.; Jayet, C.; Assous, M.; Maitrejean, S.; Galpin, D.; Monget, C.; Guillan, J.; Chhun, S.; Richard, E.; Barbier, D.; Haond, M.

In Microelectronic Engineering 2010 87(3):316-320

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

Dense SiOC cap for damage-less ultra low k integration with direct CMP in C45 architecture and beyond

Academic Journal

Chapelon, L.L.; Chaabouni, H.; Imbert, G.; Brun, P.; Mellier, M.; Hamioud, K.; Vilmay, M.; Farcy, A.; Torres, J.

In Microelectronic Engineering 2008 85(10):2098-2101

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

Demonstration of TFHM scalability to 32 nm node BEOL interconnect and extendibility to ELK k ≤ 2.3 dielectric material

Conference

Hamioud, K.; Arnal, V.; Farcy, A.; Jousseaume, V.; Zenasni, A.; Gourhant, O.; Icard, B.; Pradelles, J.; Manakli, S.; Brun, Ph.; Imbert, G.; Jayet, C.; Assous, M.; Maitrejean, S.; Vilmay, M.; Galpin, D.; Monget, C.; Guillan, J.; Chhun, S.; Richard, E.; Barbier, D.; Haond, M.

2009 IEEE International Interconnect Technology Conference Interconnect Technology Conference, 2009. IITC 2009. IEEE International. :155-156 Jun, 2009

Full Text (IEEE) Find it@PNU

Investigation of the impact of CoWp self-aligned barrier deposition on the porous siOC properties after a direct CMP process

Conference

Gall, S.; Olivier, S.; Assou, M.; Bernard, M.; Haumesser, P.H.; Jayet, C.; Maitrejean, S.; Hamioud, K.; Arnal, V.; Passemard, G.

2008 International Interconnect Technology Conference Interconnect Technology Conference, 2008. IITC 2008. International. :126-128 Jun, 2008

Full Text (IEEE) Find it@PNU

Materials and processes for high signal propagation performance and reliable 32 nm node BEOL

Conference

Arnal, V.; Farcy, A.; Aimadeddine, M.; Jousseaume, V.; Gosset, L.G.; Guillan, J.; Assous, M.; Favennec, L.; Zenasni, A.; David, T.; Hamioud, K.; Chapelon, L-L.; Jourdan, N.; Vanypre, T.; Mourier, T.; Chausse, P.; Maitrejean, S.; Guedj, C.; Torres, J.

2007 IEEE International Interconnect Technology Conferencee International Interconnect Technology Conference, IEEE 2007. :1-3 Jun, 2007

Full Text (IEEE) Find it@PNU

Robust integration of an ULK SiOCH dielectric (k=2.3) for high performance 32nm node BEOL

Conference

Aimadeddine, M.; Jousseaume, V.; Arnal, V.; Favennec, L.; Farcy, A.; Zenasni, A.; Assous, M.; Vilmay, M.; Jullian, S.; Maury, P.; Delaye, V.; Jourdan, N.; Vanypre, T.; Brun, P.; Imbert, G.; LeFriec, Y.; Mellier, M.; Chaabouni, H.; Chapelon, L.L.; Hamioud, K.; Volpi, F.; Louis, D.; Passemard, G.; Torres, J.

2007 IEEE International Interconnect Technology Conferencee International Interconnect Technology Conference, IEEE 2007. :175-177 Jun, 2007

Full Text (IEEE) Find it@PNU

Development and integration of a porous ULK dielectric (k=2.3 and below) for high performance BEOL interconnect

Conference

Hamioud, K.; Farcy, A.; Barbier, D.; Arnal, V.; Favennec, L.; Aimadeddine, M.; Imbert, G.; Chapelon, L.-L.; Passemard, G.; Torres, J.; Gall, S.; Assous, M.; Jousseaume, V.; Zenasni, A.; Brun, P.; Jayet, C.; Maitrejean, S.; Louis, D.

In: Advanced Metallization Conference (AMC), Advanced Metallization Conference 2007, AMC 2007. (Advanced Metallization Conference (AMC), 2008, :439-445)

Scopus Find it@PNU

부산대학교 도서관

메일 발송