학술논문
Predicting DUV open contact with scarce sampling using contour-based metrics
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , 37th European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12472)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X