학술논문
Comparison between organic spin-on BARC and carbon-containing CVD stack for 65nm gate patterning
Document Type
Conference Paper
Author
Source
In: Progress in Biomedical Optics and Imaging - Proceedings of SPIE , Advances in Resist Technology and Processing XXII. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE, 2005, 5753(II):708-719)
Subject
Language
English
ISSN
16057422