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Dependence of the minimal PVD TA(N) sealing thickness on the porosity of Zirkon™ LK dielectric films
Academic Journal
Iacopi, F ; Zistl, C; Jehoul, C; Tokei, Zs; Le, Q.T; Das, A; Sullivan, C; Prokopowicz, G; Gronbeck, D; Gallagher, M; Calvert, J; Maex, K
In Microelectronic Engineering 2002 64(1):351-360
Academic Journal
Academic Journal
Academic Journal
Vacancies and self-interstitials in germanium observed by perturbed angular correlation spectroscopy
Academic Journal
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[AR] Zistl, C
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