학술논문
Unfolding an Elusive Area-Selective Deposition Process: Atomic Layer Deposition of TiO2 and TiON on SiN vs SiO2
Document Type
Article
Author
Source
In: ACS Applied Materials and Interfaces . (ACS Applied Materials and Interfaces, 20 March 2024, 16(11):14288-14295)
Subject
Language
English
ISSN
19448252
19448244
19448244