학술논문
Polysilicon-germanium gate patterning studies in a high density plasma helicon source
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, July/August 1997, 15(4):1874-1880)
Subject
Language
English
ISSN
07342101