학술논문
Carbon ion implantation as healing strategy for improved reliability in phase-change memory arrays
Document Type
Article
Author
Bourgeois, G.; Meli, V.; Al Mamun, F.; Mazen, F.; Nolot, E.; Martinez, E.; Barnes, J.-P.; Bernier, N.; Jannaud, A.; Laulagnet, F.; Hemard, B.; Castellani, N.; Bernard, M.; Sabbione, C.; Milesi, F.; Magis, T.; Socquet-Clerc, C.; Coig, M.; Garrione, J.; Cyrille, M.-C.; Charpin, C.; Navarro, G.; Andrieu, F.
Source
In Microelectronics Reliability November 2021 126
Subject
Language
ISSN
0026-2714