학술논문
'학술논문'
에서 검색결과 89건 | 목록
1~10
Conference
Kim, S.; Chung, N.Y.; Maeng, K.; Cho, H.; Lim, J.; Jang, H.; Kim, J.H.; Kim, I.; Van Setten, E.; Keizers, H.; Patil, A.; Beekmans, S.; Lee, J.; Kim, K.-S.; Lee, J.; Park, S.-W.; Tang, J.; Hsu, S.; Zhang, Y.; Derks, P.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12953)
Conference
Finders, J.; Vaenkatesan, V.; Van Kessel, L.; Maas, R.; Van Rhee, T.; Kakkar, V.; Gustas, D.; Van Setten, E.; Van Lare, C.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12953)
Conference
Calado, V.; Mathijssen, S.; Van Setten, E.; Finders, J.; Wittebrood, F.; Bouman, W.; Bhattacharyya, K.; Op 'T Root, W.; McNamara, E.; McLaren, M.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12953)
Conference
Erdmann, A.; Mesilhy, H.; Evanschitzky, P.; Bottiglieri, G.; Van Setten, E.; Van Lare, C.; Van De Kerkhof, M.; Brunner, T.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12953)
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 April 2021, 20(2))
Conference
Franke, J.-H.; Van Look, L.; Frommhold, A.; Colina, A.; Rispens, G.; Rio, D.; van Setten, E.; Maslow, M.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12915)
Conference
Davydova, N.; Huddleston, L.; Slachter, B.; Timmermans, F.; Wittebrood, F.; Van Setten, E.; Wilson, D.; Van Look, L.; Weldeslassie, A.; Wiaux, V.; Pellens, N.
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
Davydova, N.; Timmermans, F.; van Setten, E.; Slachter, B.; Huddleston, L.; van Lare, C.; Beckers, M.; van Gorp, S.; Lambregts, C.; Li, C.-T.; van de Nes, A.; de Bruin, D.; Carpaij, R.; van Look, L.; Wiaux, V.; Bekaert, J.; D'Havé, K.; Kovalevich, T.; Zhao, R.; Sun, D.; Tien, M.-C.; Hsu, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12494)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12494)
Academic Journal
Van Schoot, J.; Van Setten, E.; Rispens, G.; Troost, K.Z.; Kneer, B.; Migura, S.; Neumann, J.T.; Kaiser, W.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 October 2017, 16(4))
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제한된 항목
[AR] van Setten, E.
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