학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 49건 | 목록 1~10
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology. (Journal of Micro/Nanopatterning, Materials and Metrology, 1 October 2023, 22(4))
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology. (Journal of Micro/Nanopatterning, Materials and Metrology, 1 April 2023, 22(2))
Academic Journal
In: Japanese Journal of Applied Physics. (Japanese Journal of Applied Physics, 1 April 2024, 63(4))
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology. (Journal of Micro/Nanopatterning, Materials and Metrology, 1 July 2022, 21(3))
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology. (Journal of Micro/Nanopatterning, Materials and Metrology, 1 April 2022, 21(2))
Academic Journal
Journal of Chemical Physics. 2015, Vol. 142 Issue 5, p1-7. 7p. 4 Diagrams, 1 Chart, 1 Graph.
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Optical and EUV Nanolithography XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12494)
검색 결과 제한하기
제한된 항목
[AR] Franke, J.-H.
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