학술논문
'학술논문'
에서 검색결과 49건 | 목록
1~10
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 October 2023, 22(4))
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 April 2023, 22(2))
Academic Journal
Philipsen, V.; Frommhold, A.; Thakare, D.; Libeert, G.; Lee, I.; Franke, J.-H.; Bekaert, J.; Van Look, L.; Pellens, N.; De Bisschop, P.; Jonckheere, R.; Kovalevich, T.; Wiaux, V.; Hendrickx, E.
In: Japanese Journal of Applied Physics . (Japanese Journal of Applied Physics, 1 April 2024, 63(4))
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 July 2022, 21(3))
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 April 2022, 21(2))
Academic Journal
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
Brunner, T.A.; Tabery, C.; De Poortere, E.; Franke, J.-H.; Truffert, V.; De Bisschop, P.; Hendrickx, E.; Rispens, G.; Duriau, E.; Van De Kerkhof, M.; Van Dijk, A.; Rio, D.
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12494)
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제한된 항목
[AR] Franke, J.-H.
발행연도 제한
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