학술논문
'학술논문'
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1~10
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12955)
Conference
Ridane, M.; Nikolsky, P.; Chen, K.-M.; Serebryakov, A.; Zhang, L.; Chen, I.; Su, Y.-C.; Cho, K.; Song, J.; Lee, S.; Park, S.; Park, J.; Lin, K.; Yu, E.; Elmalk, A.; Hsieh, C.-H.; Jee, T.; You, J.; Lee, H.-G.; Park, J.; Kim, J.; Kim, S.-W.; Hong, S.; Seo, J.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12496)
Conference
Zhou, W.Z.; Zhou, K.; Bian, Y.Y.; Zhang, Y.; Van Mil, I.; Zhu, R.; Zhu, J.; Mao, I.; Chi, K.Y.; Zhu, X.; Pao, K.; Wang, P.; Wang, L.; Elmalk, A.; Zhang, G.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12053)
Conference
Zhou, K.; Guo, X.; Bian, Y.; Zhou, W.; Zhang, Y.; Van Mil, I.; Shi, E.; Zhu, R.; Zhu, J.; Mao, I.; Koolen, E.; Chi, K.; Trinchant, J.C.F.; Isai, G.; Chen, S.; Wang, J.; Wang, P.; Su, S.; Zhu, X.; Lin, K.; Pao, K.; Thuijs, K.; Lee, P.; Elmalk, A.; Raghunathan, S.; Zhang, A.; Liang, L.; Wang, X.; Zhang, G.
In: IWAPS 2021 - 2021 5th International Workshop on Advanced Patterning Solutions , IWAPS 2021 - 2021 5th International Workshop on Advanced Patterning Solutions. (IWAPS 2021 - 2021 5th International Workshop on Advanced Patterning Solutions, 2021)
Conference
Wei, F.; Zhang, C.; Meng, H.; Chu, Z.; Huang, C.; Wu, L.; Chen, H.; He, D.; Chen, L.; Jin, D.; Shi, E.; Zhu, R.; Su, S.; Wang, P.; Zhang, H.W.; Chi, K.Y.; Zhu, X.; Lin, K.; Lee, P.; Chen, S.; Elmalk, A.; Zhang, A.; Liang, L.
In: IWAPS 2021 - 2021 5th International Workshop on Advanced Patterning Solutions , IWAPS 2021 - 2021 5th International Workshop on Advanced Patterning Solutions. (IWAPS 2021 - 2021 5th International Workshop on Advanced Patterning Solutions, 2021)
Conference
He, W.; Xu, C.; Bae, D.; Chen, K.; Lan, A.; Yang, R.; Elmalk, A.; Jiang, A.; Wang, F.; Chung, D.; Su, S.; Pao, K.-F.; Patterson, O.D.; Raghunathan, S.; Kea, M.; Liao, J.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11611)
Conference
Zhou, W.; Wei, F.; Zhang, Y.; Zhu, J.; Hu, C.-Y.; Zhu, R.; Chen, S.; Lin, L.; Liang, L.; Cho, K.; Pao, K.-F.; Jain, V.; Elmalk, A.; Raghunathan, S.; Hunsche, S.; Liu, L.; Corradi, A.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11611)
Conference
Chen, K.-M.; Henke, W.; Jung, J.-H.; Kasperkiewicz, E.; Bouma, A.; Kim, G.-G.; Tsiachris, S.; Yoo, J.-D.; Park, Y.; Park, J.; Won, J.; Oh, N.-L.; Chen, H.-Y.; Lin, W.; Hsieh, C.-H.; Pao, K.-F.; Cho, K.; Elmalk, A.; Raghunathan, S.; Rahman, R.; Isai, G.; Jee, T.; Jeong, S.-U.; Jae, J.; Kim, S.-W.; Lee, D.; Kim, J.; Ma, W.; Lee, S.-H.; Park, C.-H.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11611)
Conference
Wang, C.; Cao, P.; Delorme, M.; Wuu, J.-Y.; Fu, J.; Wang, F.; Lin, B.; Zhao, Y.; Peng, Y.-H.; Fan, Y.; Feng, M.; Cheng, B.; Wang, J.-S.; Simmoms, M.; Hunsche, S.; Patterson, O.; Pao, K.-F.; Elmalk, A.; Gao, K.; Fei, R.; Zeng, X.; Zhang, X.
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography XII. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11609)
Academic Journal
In: Chemistry - A European Journal . (Chemistry - A European Journal, 17 October 2011, 17(43):12015-12019)
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제한된 항목
[AR] Elmalk, A.
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