학술논문
'학술논문'
에서 검색결과 18건 | 목록
1~10
Conference
Cho, K.; Tomori, H.; Dinh, C.Q.; Hara, A.; Fujimoto, S.; Dauendorffer, A.; Muramatsu, M.; Nagahara, S.; Huli, L.; Kato, K.; Antonovich, N.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XLI. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12957)
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 April 2022, 21(2))
Academic Journal
Dinh, C.Q.; Kuwahara, Y.; Dauendorffer, A.; Yoshida, K.; Okada, S.; Onitsuka, T.; Kawakami, S.; Shimura, S.; Muramatsu, M.; Yoshihara, K.; Nagahara, S.; Petersen, J.S.; De Simone, D.; Foubert, P.; Vandenberghe, G.; Huli, L.; Grzeskowiak, S.; Krawicz, A.; Bae, N.; Kato, K.; Nafus, K.; Raley, A.
In: Journal of Photopolymer Science and Technology . (Journal of Photopolymer Science and Technology, 2022, 35(1):87-93)
Conference
Proceedings of SPIE; 12/19/2023, Vol. 12750, p1275004-1275004, 1p
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
Nagahara, S.; Tsuboi, A.; Dauendorffer, A.; Okada, S.; Genjima, H.; Nagamine, N.; Thiam, A.; Feurprier, Y.; Demand, M.; Ramaneti, R.; Liu, X.; Kuwahara, Y.; Dinh, C.Q.; Kawakami, S.; Muramatsu, M.; Shimura, S.; Nafus, K.; Foubert, P.; De Simone, D.; Vendenberghe, G.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XL. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12498)
Conference
Dinh, C.Q.; Kuwahara, Y.; Dauendorffer, A.; Okada, S.; Fujimoto, S.; Kawakami, S.; Shimura, S.; Muramatsu, M.; Cho, K.; Nagahara, S.; Liu, X.; Nafus, K.; Carcasi, M.; Agarwal, A.; Somervell, M.; Huli, L.; Kato, K.; Kocsis, M.; De Schepper, P.; Meyers, S.; McQuade, L.; Kasahara, K.; Garcia Santaclara, J.; Hoefnagels, R.; Anderson, C.; Naulleau, P.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XL. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12498)
Periodical
Naulleau, Patrick P.; Gargini, Paolo A.; Itani, Toshiro; Ronse, Kurt G.; Pak, M.; Dauendorffer, A.; Nafus, K.; Das, A.; Hasan, M.; Delgadillo, P. R.
Proceedings of SPIE; November 2023, Vol. 12750 Issue: 1 p1275004-1275004-11
Conference
Raley, A.; Huli, L.; Grzeskowiak, S.; Lutker-Lee, K.; Krawicz, A.; Liu, E.; Kato, K.; Bae, N.; LaRose, J.; Metz, A.; Hetzer, D.; Ko, A.; Biolsi, P.; Feurprier, Y.; Nafus, K.; Dauendorffer, A.; Okada, S.; Ido, Y.; Onitsuka, T.; Kawakami, S.; Fujimoto, S.; Shimura, S.; Congque, D.; Muramatsu, M.; Nagahara, S.; Honda, M.; Nishizuka, T.; Mochiki, H.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advanced Etch Technology and Process Integration for Nanopatterning XI. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12056)
Conference
Tadatomo, H.; Dauendorffer, A.; Onitsuka, T.; Genjima, H.; Ido, Y.; Okada, S.; Kuwahara, Y.; Hara, A.; Dinh, C.; Fujimoto, S.; Kawakami, S.; Muramatsu, M.; Shimura, S.; Nafus, K.; Oikawa, N.; Ono, K.; Feurprier, Y.; Demand, M.; Negreira, A.R.; Nagahara, S.; Victor, B.; Foubert, P.; De Simone, D.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advanced Etch Technology and Process Integration for Nanopatterning XI. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12056)
검색 결과 제한하기
제한된 항목
[AR] Dauendorffer, A.
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