학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 18건 | 목록 1~10
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Advances in Patterning Materials and Processes XLI. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12957)
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology. (Journal of Micro/Nanopatterning, Materials and Metrology, 1 April 2022, 21(2))
Conference
Proceedings of SPIE; 12/19/2023, Vol. 12750, p1275004-1275004, 1p
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Advances in Patterning Materials and Processes XL. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12498)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Advances in Patterning Materials and Processes XL. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12498)
Periodical
Proceedings of SPIE; November 2023, Vol. 12750 Issue: 1 p1275004-1275004-11
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Advanced Etch Technology and Process Integration for Nanopatterning XI. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12056)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Advanced Etch Technology and Process Integration for Nanopatterning XI. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12056)
검색 결과 제한하기
제한된 항목
[AR] Dauendorffer, A.
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