학술논문
'학술논문'
에서 검색결과 141건 | 목록
1~10
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Cen, Yinjie; Park, Jong Keun; Coley, Suzanne M.; Naab-Rafael, Benjamin D.; Cui, Li; Aqad, Emad; Alexandrescu, Stefan; Rena, Rochelle; Eckert, Sylvie; Behnke, Jason; Lee, ChoongBong; Petrillo, Karen
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129570A-129570A-7, 1166138p
Periodical
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129571I-129571I-6, 1166146p
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Popescu, C.; O'Callaghan, G.; McClelland, A.; Storey, C.; Roth, J.; Jackson, E.; Robinson, A. P. G.
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129570R-129570R-8, 1166139p
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Baek, Seungjoo; Heo, Seonggil; Vandereyken, Jelle; Suh, Hyo Seon; Caron, Elke; Santos, Andreia; Harumoto, Masahiko; Guerrero, Douglas J.
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129572G-129572G-7, 1166156p
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Yamamoto, Hiroki; Tsutsui Ito, Yuko; Okamoto, Kazumasa; Kozawa, Takahiro
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129572F-129572F-7, 1166156p
Periodical
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129572E-129572E-7, 1166156p
Periodical
Guerrero, Douglas; Amblard, Gilles R.; LaBeaume, P.; Hernandez, K.; Vitaku, E.; Marangoni, T.; Aqad, E.; Li, M.; Hoelzel, C.; Lachowski, J.; Hayes, M.; Wong, S.; Li, J.; Kwok, A.; Huang, W.; Park, J.; He, H.; Mackay, H.; Liu, C.; Cameron, J.; Xu, C.; Xie, Q.; Petrillo, K.
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129572B-129572B-6, 1166155p
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Cen, Yinjie; Aqad, Emad; Cui, Li; Coley, Suzanne M.; Park, Jong Keun; Naab-Rafael, Benjamin D.; Rena, Rochelle; Paul, Tyler; Eckert, Sylvie; Wu, Chunyi; Finch, Mike; Behnke, Jason; Lee, ChoongBong; Petrillo, Karen
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129571Z-129571Z-8, 1166148p
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Kim, Gayoung; Ku, Yejin; Lee, Jin-Kyun; Kim, Jiho; Park, Byeong-Gyu; Lee, Sangsul; Jang, Yu Ha; Jung, Byung Jun; Koh, Chawon; Nishi, Tsunehiro; Kim, Hyun-Woo
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129571X-129571X-6, 1166146p
Understanding and improving performance of 14-nm HP EUV lithography via rational design of materials
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Li, Si; Sweat, Daniel; Lu, Xinlin; Brakensiek, Kelsey; Lu, Pengtao; Lowes, Joyce; Van Driessche, Veerle; Guerrero, Douglas J.
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129571T-129571T-8, 1166148p
검색 결과 제한하기
제한된 항목
[AR] Amblard, Gilles R.
발행연도 제한
-
학술DB(Database Provider)
저널명(출판물, Title)
출판사(Publisher)
자료유형(Source Type)
언어