학술논문
Evaluation of wet-developable KrF organic BARC to improve CD uniformity for implant application
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Resist Technology and Processing XXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2004, 5376(PART 1):461-470)
Subject
Language
English
ISSN
0277786X