학술논문
Determining the validity domain of roughness measurements as a function of CD-SEM acquisition conditions
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11611)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X