학술논문
Cutting-edge CMP modeling for front-end-of-line (FEOL) and full stack hotspot detection for advanced technologies
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Design-Process-Technology Co-optimization for Manufacturability XI. (Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10148)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X