학술논문
Ultra-scaled high-frequency single-crystal Si NEMS resonators and their front-end co-integration with CMOS for high sensitivity applications
Document Type
Conference
Author
Source
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. :1368-1371 Jan, 2012
Subject
Language
ISSN
1084-6999
Abstract
This paper reports on ultra-scaled single-crystal Si NEMS resonators (25–40nm thick) operating in the 10–100MHz frequency range. Their first monolithic integration at the front-end level with CMOS enables to extract the signal from background leading to possible implementation of direct/homodyne measurement, for high sensitivity sensing applications and portable systems.