학술논문
'학술논문'
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Conference
IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168) Semiconductor manufacturing Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI. :230-234 1998
Report
Gehring, Pascal; Benia, Hadj M.; Weng, Ye; Dinnebier, Robert; Ast, Christian R.; Burghard, Marko; Kern, Klaus
Nano Letters, 13, 1179 (2013)
Conference
Proceedings of 11th International Conference on Ion Implantation Technology Ion implantation technology Ion Implantation Technology. Proceedings of the 11th International Conference on. :162-165 1996
Academic Journal
Deblock, R.; Kociak, M.; Reulet, B.; Bouchiat, H.; Khodos, I. I.; Volkov, V. T.; Journet, C.; Burghard, M.
Science, 1999 May . 284(5419), 1508-1511.
Conference
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - ASMC '92 Proceedings Advanced Semiconductor Manufacturing Conference and Workshop, 1992. ASMC 92 Proceedings. IEEE/SEMI 1992. :16-17 1992
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제한된 항목
[검색어] Burghard, R.
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