학술논문
'학술논문'
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Novel overlay correction by synchronizing scan speed to intra-die fingerprint on lithography scanner
Conference
Hamasaki, Masakazu; Hagio, Yoshinori; Kasa, Kentaro; Kato, Yoshimitsu; Takakuwa, Manabu; Obata, Tsutomu; Nakao, Shunichi; Miyake, Manabu; Kato, Katsuya; Takahata, Yosuke; Nakae, Akihiro
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2020 31st Annual. :1-6 Aug, 2020
Academic Journal
In CVD Prevention and Control 2010 5(2):51-58
Conference
Mizushima, Masanori; Takagi, Shigeo; Itano, Hiromichi; Obata, Tsutomu; Kasahara, Takashi; Shoji, Shuichi; Mizuno, Jun
2014 International Conference on Electronics Packaging (ICEP) Electronics Packaging (ICEP), 2014 International Conference on. :756-759 Apr, 2014
Academic Journal
Kobayashi, Eiji; Jin, Aishun; Hamana, Hiroshi; Shitaoka, Kiyomi; Tajiri, Kazuto; Kusano, Seisuke; Yokoyama, Shigeyuki; Ozawa, Tatsuhiko; Obata, Tsutomu; Muraguchi, Atsushi; Kishi, Hiroyuki
Nature Biomedical Engineering; Jul2022, Vol. 6 Issue 7, p806-818, 13p
Academic Journal
Jin, Aishun; Ozawa, Tatsuhiko; Tajiri, Kazuto; Obata, Tsutomu; Kondo, Sachiko; Kinoshita, Koshi; Kadowaki, Shinichi; Takahashi, Kazuo; Sugiyama, Toshiro; Kishi, Hiroyuki; Muraguchi, Atsushi
Academic Journal
Ohnaga, Takashi; Shimada, Yutaka; Takata, Koji; Obata, Tsutomu; Okumura, Tomoyuki; Nagata, Takuya; Kishi, Hiroyuki; Muraguchi, Atsushi; Tsukada, Kazuhiro
Molecular and Clinical Oncology. April 1, 2016, p599, 4 p.
Academic Journal
Nature Protocols. May 1, 2011, Vol. 6 Issue 5, p668, 9 p.
Academic Journal
Kawasegi, Noritaka; Takano, Noboru; Oka, Daisuke; Morita, Noboru; Yamada, Shigeru; Kanda, Kazutaka; Takano, Shigeto; Obata, Tsutomu; Ashida, Kiwamu
Journal of Manufacturing Science and Engineering. August 2006, Vol. 128 Issue 3, p723, 7 p.
Academic Journal
Lin, Zhezhu; Jin, Aishun; Ozawa, Tatsuhiko; Tajiri, Kazuto; Obata, Tsutomu; Ishida, Isao; Jin, Feng; Kishi, Hiroyuki; Muraguchi, Atsushi
Book
Single-Cell Analysis; 2012, p141-150, 10p
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[AR] Obata, Tsutomu
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