학술논문
'학술논문'
에서 검색결과 30건 | 목록
20~30
Conference
Kagalwala, T.; Vaid, A.; Mahendrakar, S.; Lenahan, M.; Fang, F.; Shifrin, M.; Etzioni, Y.; Isbester, P.; Cepler, A.; Yellai, N.; Dasari, P.; Bozdog, C.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXX. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9778)
Conference
Chao, R.; Breton, M.; L'Herron, B.; Mendoza, B.; Muthinti, R.; Nelson, F.; De La Pena, A.; Le, F.L.; Miller, E.; Sieg, S.; Demarest, J.; Cardinal, T.; Kanakasabapathy, S.; Gaudiello, J.; Felix, N.; Gin, P.; Wormington, M.; Cepler, A.; Sendelbach, M.; Bozdog, C.; Wolfling, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXX. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9778)
Conference
In: 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015 , 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015. (2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015, 22 July 2015, :72-77)
Conference
Chao, R.; Liu, C.-C.; Felix, N.; Bozdog, C.; Cohen, O.; Wolfling, S.; Cepler, A.; Sendelbach, M.; Bailey, T.
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9424)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2014, 9050)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2014, 9050)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8681)
Conference
Solecky, E.; Patterson, O.D.; Stamper, A.; McLellan, E.; Buengener, R.; Vaid, A.; Hartig, C.; Bunday, B.; Arceo, A.; Cepler, A.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8681)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8681)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography III. (Proceedings of SPIE - The International Society for Optical Engineering, 2012, 8322)
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제한된 항목
[AR] Cepler, A.
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