부산대학교 도서관

A microprocessor-based X-Y scan control unit was developed to interface with existing PHI Scanning Auger Microprobe and exoelectron emission electronics. The unit provides precise and versatile control of the rastered beams used for surface analysis. In addition to manual control there are options for automatic line and area scans with up to 1000 discrete beam analysis points per line (up to 10/sup 6/ for an entire frame area) and scanning rates continuously adjustable from 1 to 2000 points per second. The design of the unit is such that it can be used in a variety of applications requiring accurate X-Y position control. This report gives a complete description of the scanning control unit's operating controls, internal programming, and circuitry.