부산대학교 도서관

The LaFeO3 and CaFeOX layers are grown using highly dense target prepared by Pechini method, with which accurate growth rate is achieved. Since the LaFeO3demonstrates the obvious RHEED oscillation until the end of growth, constant growth rate, and the step-terraces structure, the LFO is employed as a buffer and/or reference layer to determine the required pulses to deposit the thickness we desire in the superlattice. Superlattices show the clear satellite peaks and Laue oscillation in the XRD spectra as well as the oscillations caused by the film thickness with a flat surface and superstructure with a flat interface in the x-ray reflection spectrum. The streaky RHEED patterns and step-terraces surface are consistent with the results of spectra using x-ray.