부산대학교 도서관

Submicronic powder of silicon carbide was synthesized in a pilot novel radiofrequency plasma torch reactor. The precursors were pyrolysis char and silica powders both with micrometric size. The mass rate of the precursor powder varied in the range 600-2500 g/h. The maximum test time was approximately 3 h. With the goal to increase the process yield, several technical measures were implemented. Silicon carbide yield was above 70 wt% when the plasma flame was confined by a tube that prolonged the residence time of the reactants at the useful temperature for the advancement of reaction. The silicon carbide was characterized by XRD, SEM, and DLS. Both α and β-crystalline phases were detected.