부산대학교 도서관

Si-steel (Fe-Si), permalloy (Fe-Ni) and amorphous alloys (Fe-based, Co-based) are well known as typical soft magnetic alloys. They are used for many kinds of electrical and electronic parts, such as magnetic recording heads, transformers and inductors. In order to get superior soft magnetic properties of CoFe-based nanocrystalline thin lms, Co-Fe-Al-O lms have been investigated. These lms exhibit excellent soft magnetic properties: saturation magnetization (4 Ms) of 16{19 kG, magnetic coercivity (Hc) of 0.5-1 Oe, anisotropy eld (Hk) of less than 1 Oe and electrical resistivity () as high as 500 cm. The combination of high 4 Ms and relatively high (Hk) in these lms is believed to be partly responsible for the excellent ultra-high-frequency behavior. The soft magnetic properties and electrical properties of these lms are dependent on the partial pressure of reactive gas, which presumably changes the microstructure of the lms and related magnetic anisotropy.