학술논문
Fabrication and characterization of PMN-PT single crystal cantilever array for cochlear-like acoustic sensor
Document Type
Article
Source
Journal of Mechanical Science and Technology, 24(1), pp.181-184 Jan, 2010
Subject
Language
English
ISSN
1976-3824
1738-494X
1738-494X
Abstract
We have successfully fabricated piezoelectric PMN-PT single crystal cantilever array. Each PMN-PT cantilever has a different length to achieve different resonance frequencies. The width and thickness of PMN-PT cantilever array are 200 μm and 10 μm, respectively. Resonance frequencies of PMN-PT cantilevers were measured with laser interferometer, and charge sensitivity was measured with charge-measuring device. PMN-PT cantilever array was installed in a noise-shield case. The array was then exposed to sound pressure frequency corresponding to resonance frequency to measure its sensitivity. The experimental results show that the PMN-PT cantilever array has high sensitivity to the sound pressure. This implies that the single crystal PMN-PT cantilever array is a potential candidate for a cochlear-like acoustic sensor.