학술논문 – 부산대학교 도서관

학술논문

replay검색결과 돌아가기

search검색화면

Damascene versus subtractive line CMP process for resistive memory crossbars BEOL integration

Document Type

Article

Author

Dawant, R.; Gaudreau, M.; Roy, M.-A.; Mouny, P.-A.; Valdenaire, M.; Gliech, P.; Zapata, J.A.; Zegaoui, M.; Alibart, F.; Drouin, D.; Ecoffey, S.

Source

In: Micro and Nano Engineering. (Micro and Nano Engineering, June 2024, 23)

Subject

Language

English

ISSN

25900072

Online Access

Full Text (ScienceDirect 종량제) Full Text (ScienceDirect O/A) JCR 저널정보 Scopus Find it@PNU

이메일