학술논문
Phase Identification of 850 nm Thick 7%YO1.5 -93%HfO2 Films by Surface and Cross-Sectional Raman Spectroscopies
Document Type
Article
Author
Source
In: ACS Applied Electronic Materials . (ACS Applied Electronic Materials, 23 April 2024, 6(4):2500-2506)
Subject
Language
English
ISSN
26376113