학술논문
A Dispersion-Engineered YX-LN/SIO2 /Sapphire SH-SAW Resonator for Enhanced Electromechanical Coupling and Rayleigh Mode Suppression
Document Type
Conference Paper
Author
Source
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) , IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2024, :27-30)
Subject
Language
English
ISSN
10846999