학술논문
Analysis of Altered Layers Formed during Substrate Exfoliation of AlGaN Crystals Grown on Periodic AlN Nanopillars Using the Heated-Pressurized Water Method
Document Type
Article
Author
Source
In: Physica Status Solidi (B) Basic Research . (Physica Status Solidi (B) Basic Research, 2024)
Subject
Language
English
ISSN
15213951
03701972
03701972