학술논문

Silatrane-Based Molecular Nanolayers as Efficient Diffusion Barriers for Cu/SiO2/Si Heterojunctions: Implications for Integrated Circuit Manufacturing
Document Type
Article
Source
In: ACS Applied Nano Materials. (ACS Applied Nano Materials, 8 March 2024, 7(5):4874-4885)
Subject
Language
English
ISSN
25740970