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Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers

Document Type

Article

Author

Butt, J.N.; Tyndall, N.F.; Pruessner, M.W.; Walsh, K.J.; Stievater, T.H.; Miller, B.L.; Fahrenkopf, N.M.; Antohe, A.O.

Source

In: APL Photonics. (APL Photonics, 1 January 2024, 9(1))

Subject

Language

English

ISSN

23780967

Online Access

Full Text (AIP) Open Access (EBSCO) Web of Science JCR 저널정보 Scopus Find it@PNU

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