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Gallium phosphide conformal film growth on in-situ tri-TBP dry-cleaned InGaP/GaAs using atomic hydrogen ALD

Document Type

Article

Author

Yun, S.; Mcleod, A.J.; Kummel, A.C.; Lee, P.-C.; Kuo, C.-H.; Zhang, Z.; Wang, V.; Huang, J.; Kashyap, H.; Winter, C.H.

Source

In: Vacuum. (Vacuum, February 2024, 220)

Subject

Language

English

ISSN

0042207X

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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