학술논문
Improved Reproducibility of Deflection Control Process for Cantilever-Type MEMS Tactile Sensors
Document Type
Article
Author
Source
In: IEEJ Transactions on Electrical and Electronic Engineering . (IEEJ Transactions on Electrical and Electronic Engineering, May 2024, 19(5):888-893)
Subject
Language
English
ISSN
19314981
19314973
19314973