학술논문
Mechanical and tribological properties of (AlCoCrNiSi)100−x Nx thin films
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 January 2024, 42(1))
Subject
Language
English
ISSN
15208559
07342101
07342101