학술논문
Integration of (Poly-Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer-Level MOEMS Fabrication Process
Document Type
Article
Author
Source
In: IEEJ Transactions on Electrical and Electronic Engineering . (IEEJ Transactions on Electrical and Electronic Engineering, May 2024, 19(5):767-772)
Subject
Language
English
ISSN
19314981
19314973
19314973