학술논문
Training Dataset Optimization for Deep Learning applied to Optical Proximity Correction on non-regular hole masks
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , 38th European Mask and Lithography Conference, EMLC 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12802)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X