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High Thermal Conductivity of Submicrometer Aluminum Nitride Thin Films Sputter-Deposited at Low Temperature

Document Type

Article

Author

Perez, C.; Asheghi, M.; Goodson, K.E.; Hood, R.; Talin, A.A.; Kumar, S.; McLeod, A.J.; Kummel, A.C.; Chen, M.E.; Pop, E.; Yi, S.-I.; Vaziri, S.; Bao, X.; Ueda, S.T.; Park, W.

Source

In: ACS Nano. (ACS Nano, 14 November 2023, 17(21):21240-21250)

Subject

Language

English

ISSN

1936086X
19360851

Online Access

Full Text (ACS) Web of Science JCR 저널정보 Scopus Find it@PNU

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