학술논문
Prediction by a hybrid machine learning model for high-mobility amorphous In2 O3 : Sn films fabricated by RF plasma sputtering deposition using a nitrogen-mediated amorphization method
Document Type
Article
Author
Source
In: Journal of Applied Physics . (Journal of Applied Physics, 28 October 2023, 134(16))
Subject
Language
English
ISSN
10897550
00218979
00218979