학술논문

Large-area deposition of protective (Ti,Al)N coatings onto polycarbonate
Document Type
Article
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 September 2023, 41(5))
Subject
Language
English
ISSN
15208559
07342101