학술논문
Nanoscale and Wafer Scale Study of Epitaxial Ruthenium Films on Amorphous SiO2 Substrate with van der Waals Graphene Buffer Layer
Document Type
Article
Author
Source
In: Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada . (Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada, 22 July 2023, 29(1):1674-1675)
Subject
Language
English
ISSN
14358115