학술논문
Mechanism of residue formation on Ge-rich germanium antimony tellurium alloys after plasma etching
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 September 2023, 41(5))
Subject
Language
English
ISSN
15208559
07342101
07342101