학술논문

Controlling the hydrogen concentration in boron- and gallium-doped silicon wafers
Document Type
Conference Paper
Source
In: AIP Conference Proceedings, SiliconPV 2022, the 12th International Conference on Crystalline Silicon Photovoltaics. (AIP Conference Proceedings, 27 June 2023, 2826)
Subject
Language
English
ISSN
15517616
0094243X