학술논문
Low-Resistivity Titanium Nitride Thin Films Fabricated by Atomic Layer Deposition with TiCl4 and Metal-Organic Precursors in Horizontal Vias
Document Type
Article
Author
Source
In: ACS Applied Electronic Materials . (ACS Applied Electronic Materials, 22 August 2023, 5(8):4094-4102)
Subject
Language
English
ISSN
26376113