학술논문
100 m-level Spiral Silicon Micro-Trenches with 3-Step Smooth Sidewalls to Deposit Superconducting Material for Miniaturized Magnetic Energy Storage
Document Type
Article
Author
Source
In: IEEJ Transactions on Sensors and Micromachines . (IEEJ Transactions on Sensors and Micromachines, 2022, 142(5):78-84)
Subject
Language
English
Japanese
Japanese
ISSN
13475525
13418939
13418939