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Plasma enhanced atomic layer deposition of crystallized gallium phosphide on Si with tri-Ethylgallium and tri-tert-Butylphosphine

Document Type

Article

Author

Yun, S.; Lee, P.-C.; Kummel, A.C.; Kuo, C.-H.; Ueda, S.T.; Wang, V.; Kashyap, H.; Mcleod, A.J.; Zhang, Z.; Winter, C.H.

Source

In: Applied Surface Science. (Applied Surface Science, 15 May 2023, 619)

Subject

Language

English

ISSN

01694332

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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