학술논문
Extend 0.33 NA extreme ultraviolet single patterning to pitch 28-nm metal design by low-n mask
Document Type
Article
Author
Source
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 October 2022, 21(4))
Subject
Language
English
ISSN
27088340
19325150
19325150